Design and Modeling of MEMS Based Nano Displacement PZT Sensing Element
نویسندگان
چکیده
منابع مشابه
Design and Modeling of MEMS based Nano Displacement
Piezoelectric principles are widely used to harvest energy in the process of vibrating piezoelectric mass. Different design configurations were studied in the research papers listed. A novel dynamic method of Lead Zirconate Titanate Sensor (PZT) to obtain d33 suitable for the MEMS applications is designed, simulated and analysed results were compared with the fabricated sensor. The Lead Zircona...
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ژورنال
عنوان ژورنال: International Journal of Computer Applications
سال: 2012
ISSN: 0975-8887
DOI: 10.5120/5043-7368